Managing and Cutting Down on Chemicals
Various chemical substances are used in the process of manufacturing semiconductors and storage products.
In the Group, efforts are naturally made to limit the use of harmful chemical substances as much as possible and to find alternative harmless chemical substances, and consumption of chemical substances is reduced (optimization of consumption) by improving productivity through improving the manufacturing process and yield. We are also working to minimize the impact on the global environment of chemical substances by reusing and recycling them after use and detoxifying by way of exhaust gas treatment and wastewater treatment.
As seen above, by working to reduce and improve both the use (input) and emission/disposal (output) of chemical substances, we are promoting the reduction of environmental risks in our business activities, as well as contributing to the protection of the global environment by taking the ecosystem into consideration.
Reducing the amount of chemical substances used in semiconductor manufacturing processes
Oita Operations, Japan Semiconductor Corporation
Japan Semiconductor Corporation manufactures a wide range of semiconductor products, including MCU products*1, ASIC products*2, and analog products*3. To maintain the quality of mass-produced items such as semiconductor products, continuous verification of process capabilities for manufacturing processes is indispensable. Thus, Oita Operations worked to optimize the verification frequency of process capabilities by targeting silicon wafer surface film formation equipment while maintaining quality as well as improving productivity. As a result, by reducing the frequency, silane gas used in the capacity evaluation process was reduced by 37.5% per year, resulting in a reduction in the use of chemical substances.
MCU (Micro Computer Unit) products: Semiconductors that control electronic devices. Example products: electrical and electronic products including TVs, telephones, and refrigerators; industrial equipment; vehicle engine control; and car navigation systems, etc.
ASIC (Application Specific Integrated Circuit) products: Semiconductors specially designed and manufactured according to a customer's particular use. Example products: Printers, game consoles, and electronic musical instruments, etc.
Analog products: Semiconductors that process and control analog signals of light, heat (temperature), sound, vibration, etc. captured by sensors by converting them into digital signals, or vice versa. Example products: Electrical and electronic products, car audio systems, and wireless power feeding systems, etc.
Products and Technology (Japan Semiconductor Corporation)